Genre
- Conference Proceedings
Contributors
Contributor: 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China, January 24-28
Author: Singh Bachhal, Jannat
Author: Hoorfar, Mina
Author: Paknahad, Mohammad
Author: Ahmadi, Ali
Date Issued
2016
Publisher
IEEE
Language
- English
Page range
905-908
Host Title
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China, January 24-28