Genre
- Conference Proceedings
Contributors
Author: Ahmadi, Ali
Author: Cheung, Karen C.
Author: Winer, Michael H.
Contributor: 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, CA, U.S.A., 26-30 Jan. 2014
Date Issued
2014
Publisher
IEEE
Language
- English
Page range
1051-1054
Host Title
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, CA, U.S.A., 26-30 Jan. 2014