Jericho, M. H., et al. High Stability Bimorph Scanning Tunneling Microscope. no. 4,894,537, Ho1J 37/00 H01L 41/09 (20060101), 1990, https://scholar2.islandarchives.ca/islandora/object/ir%3Air-batch6-4852.

Genre

  • Patent
Contributors
Author: Jericho, M. H.
Author: Dahn, Douglas C.
Author: Blackford, B. L.
Date Issued
1990
Publisher
Ho1J 37/00 H01L 41/09 (20060101)
Place Published
United States
Abstract

A novel scanning tunneling microscope (STM) is described which is constructed almost entirely of one metal e.g. aluminum and uses bimorph piezoelectric disks as the x, y, z drive elements. The design uses a simple, rugged tirpod configuration for the fine motion drive arms. Coarse motion of the sample, which is mounted on an aluminum holder, is achieved by pushing, or pulling, with a piezoelectric louse. Differential thermal expansion effects are avoided by design, to first order, and the resulting drift is .ltoreq.0.5 .ANG. per minute after only a short warm-up period. It is easy to build and operate, and has good immunity to mechanical vibrations.

Note

Filed July 21, 1988

Source type: Electronic(1)

http://www.patentmonkey.com/PM/patentid/4894537.aspx

Language

  • English
Volume
222,623
Issue
4,894,537

Department