Genre
- Conference Proceedings
Contributors
Author: Ahmadi, Ali
Author: Yu, Haoran
Contributor: 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China, 24-28 Jan. 2016
Author: Cheung, Karen C.
Author: Cheng, Eric
Date Issued
2016
Publisher
IEEE
Language
- English
Page range
784-787
Host Title
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China, 24-28 Jan. 2016