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Title: Variable-energy positron beam study of arsenic diffusion in poly-silicon
Type: Journal Article
Date: 1995
Authors: Weaver, L.; Lawther, Derek W.; Schultz, P. J.; Khatri, R.; Simpson, P. J.; Calder, I.
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Published In: Applied Surface Science
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DOI: https://doi.org/10.1016/0169-4332(94)00341-6
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