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Title: Positron beam study of annealed silicon nitride films
Type: Journal Article
Date: 1996
Authors: Lawther, Derek W.; Massoumi, G. R.; Landheer, D.; Simpson, P. J.; Aers, G. C.; Tong, S. Y.; Sproule, G. I.
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Published In: Journal of Applied Physics
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DOI: https://doi.org/10.1063/1.361173
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